- MWPlasma / MWPECVD Reactors
Table Top
Plasmionique’s Table Top MWPlasma / MWPECVD Reactors are designed to serve as versatile tools to…
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Plasmionique’s MWPlasma / MWPECVD Reactors use various microwave coupling modes to generate a plasma, including Single Mode cavity, Multi-Mode cavity, Standing Wave, Surface waves and Electron Cyclotron Resonance (ECR) mechanisms.
Plasmionique’s MWPlasma / MWPECVD Reactors use various microwave coupling modes to generate a plasma, including Single Mode cavity, Multi-Mode cavity, Standing Wave, Surface waves and Electron Cyclotron Resonance (ECR) mechanisms.
For low pressure operations (mbar or below) ECR offers the most efficient coupling. Other coupling mechanisms can be used to produce plasma up to atmospheric pressure.
This product can be integrated in the following system formats:
Plasmionique’s Table Top MWPlasma / MWPECVD Reactors are designed to serve as versatile tools to…
Plasmionique’s Compact MWPlasma / MWPECVD Reactors are designed to serve as versatile tools to generate…
Plasmionique’s Full Size MWPlasma / MWPECVD Reactors are designed to serve as versatile tools to…