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Plasmionique’s PECVD Reactors use various microwave coupling modes to generate a plasma, including Single Mode cavity, Multi-Mode cavity, Standing Wave, Surface waves and Electron Cyclotron Resonance (ECR) mechanisms.

For low pressure operations (mbar or below) ECR offers the most efficient coupling. Other coupling mechanisms can be used to produce plasma up to atmospheric pressure.

Products

This product can be integrated in the following system formats:

Table Top

Plasmionique’s Table Top PECVD Reactors are designed to serve as versatile tools to generate plasma…

Compact

Plasmionique’s Compact PECVD Reactors are designed to serve as versatile tools to generate plasma using…

Full Size

Plasmionique’s Full Size PECVD Reactors are designed to serve as versatile tools to generate plasma…

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