- PECVD Reactors
Table Top
Plasmionique’s Table Top PECVD Reactors are designed to serve as versatile tools to generate plasma…
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Plasmionique’s PECVD Reactors use various microwave coupling modes to generate a plasma, including Single Mode cavity, Multi-Mode cavity, Standing Wave, Surface waves and Electron Cyclotron Resonance (ECR) mechanisms.
Plasmionique’s PECVD Reactors use various microwave coupling modes to generate a plasma, including Single Mode cavity, Multi-Mode cavity, Standing Wave, Surface waves and Electron Cyclotron Resonance (ECR) mechanisms.
For low pressure operations (mbar or below) ECR offers the most efficient coupling. Other coupling mechanisms can be used to produce plasma up to atmospheric pressure.
This product can be integrated in the following system formats:
Plasmionique’s Table Top PECVD Reactors are designed to serve as versatile tools to generate plasma…
Plasmionique’s Compact PECVD Reactors are designed to serve as versatile tools to generate plasma using…
Plasmionique’s Full Size PECVD Reactors are designed to serve as versatile tools to generate plasma…