- Plasma-Based Ion Implantation
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Plasmionique’s Full Size Plasma-Based Ion Implantation systems are designed for unparalleled flexibility and feature-rich functionality.…
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Plasma-based ion implanters are an economical and versatile substitute for surface engineering applications, as well as shallow depth doping for nanoelectronics and photonics applications. The plasma-immersed ion implantation process is a conformal surface treatment and allows for deposition on structures having 3D topography.
Plasma-Based Ion Implantation systems have a demonstrated ability to minimize contamination during implantation of radioisotopes.
A variety of plasma excitation techniques are offered, depending on the required application. The systems are fully computer-controlled and include an integrated data acquisition system for real-time process parameter monitoring, as well as data logging.
This product can be integrated in the following system formats:
Plasmionique’s Full Size Plasma-Based Ion Implantation systems are designed for unparalleled flexibility and feature-rich functionality.…