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Plasmionique’s compact spectrometers are highly flexible companions for any system that uses plasma for deposition or etching/cleaning applications. They could be integrated as a versatile process monitoring tool, or for process control.
All our products are equipped with OES Capture software, which provides the user with an intuitive graphical interface for collecting and monitoring spectral emission data from the processing plasma. Addition of cooling to the CCD detector to about -30 C, using a thermoelectric cooler, minimizes the thermal noise by order of magnitude.
The software has been developed on National Instruments LabVIEW® and is distributed as a 32-bit executable program. OES Capture can manage up to 4 USB spectrometers simultaneously. Each spectrometer is assigned a separate instance of the OES Capture program. This allows each spectrometer to be independently controlled.
