Our series of Sputter Deposition Systems are highly versatile and come equipped with Plasmionique Inc.’s proprietary sputtering cathodes. They are designed for high target utilization efficiency and are available in balanced and unbalanced magnetic configurations in circular or rectangular shapes.
Plasmionique’s Compact Sputter Deposition Systems seamlessly blend the efficiency of a Table Top form factor with the adaptability and upgradability of our larger models.
The systems typically measure 46” in height, 30” in width, and 25” in depth and have the following features:
- Deposition chamber having 8” – 10″ in diameter and about 14” in height.
- Pumping system with nominal speed of 80 to 300 L/s. Base pressure low 10-6 Torr to mid 10-7 Torr ensuring a clean chamber with no additional components.
- Typically computer controlled, equipped with a programmable sputtering power supply (500 W) or a DC/Pulsed-DC (1 kW) power supply or an RF generator (300 W) with its automatic matching network.
- Addition of water-cooled magnetrons of different sizes ranging from 1” (up to 3 magnetrons), or two (2) magnetrons of 2” or a single magnetron of 3”.
- Minimum of one quartz crystal microbalance used for thickness measurement and deposition rate control.
- Rotary substrate holders have an option to be heated up to 300 °C. All heating circuits are regulated through a fully configurable PID loop with auto-tuning, ramping, and output limiting capabilities. Optionally, an axial motion control (manual or automated) may be added.
- Inclusion of substrates up to 4” in diameter.
- Incorporation of up to four (4) process gas lines and inclusion of an automated vent line.
All systems include the possibility to automate processes using recipes embedded within our PLASMICON control software. Additionally, all systems have an option to integrate optical spectroscopy for process monitoring/control.
An advanced control system is also included allowing full automation of the deposition process, a data acquisition system; real time data monitoring using a user-friendly 15” touch screen that also facilitates seamless interaction with the system control software.
Elevate your surface treatment capabilities with Plasmionique Compact systems, where innovation meets versatility.
