Our series of Sputter Deposition Systems are highly versatile and come equipped with Plasmionique Inc.’s proprietary sputtering cathodes. They are designed for high target utilization efficiency and are available in balanced and unbalanced magnetic configurations in circular or rectangular shapes.
Plasmionique’s Roll-To-Roll Sputter Deposition Systems accommodate an extensive array of sources, processes, and features, empowering your applications with maximum adaptability.
All systems include the possibility to automate processes using recipes embedded within our PLASMICON control software. Additionally, all systems have an option to integrate optical spectroscopy for process monitoring/control.
An advanced control system is also included allowing full automation of the deposition process, a data acquisition system; real time data monitoring using a user-friendly 24” touch screen that also facilitates seamless interaction with the system control software.
Plasmionique’s Roll-To-Roll systems offer a range of features, including heating capabilities up to 800 °C (or water cooling), rotation and RF or DC biasing. The heating circuits are regulated through a fully configurable PID loop with auto-tuning, ramping, and output limiting capabilities—all managed effortlessly through our user-friendly PLASMICON software.
Roll-To-roll systems can incorporate up to eight (8) process gas lines, each equipped with dedicated mass flow controllers and pneumatic shut-off valves, along with a separate chamber vent line. Up to two (2) precursor vapor injection lines utilizing heated bubbler reservoirs can be included.
Elevate your research capabilities with Plasmionique’s Roll-To-Roll Systems, where innovation meets versatility.
