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Our EBeam / Thermal Evaporation Systems allow for the evaporation of metals, dielectrics and organic materials using evaporation boats, baskets with crucibles and low temperature effusion cells for organic materials.

Plasmionique’s Table Top EBeam / Thermal Evaporation Systems are designed to serve as a versatile thin film deposition systems.

Typically measuring around 32” in width, 22” in depth, and 24” in height, these systems have the following features :

  • Deposition chamber having 8” in diameter and about 14” in height.
  • Compact turbo pump station with nominal speed up to 80 to 90 L/s. Base pressure of low 10-6 Torr to mid 10-7 Torr ensuring a clean chamber with no additional components.
  • Typically computer controlled, programmable switching voltage (0-6 VDC) switching power supply, capable of delivering up to 110 A.
  • Metal boat heaters, basket heaters, and their alumina coated versions and low temperature (LT) effusion sources could be selected.
  • The low temperature effusion cells are equipped with their own independent power supply and shutters.
  • Minimum of one quartz crystal microbalance is used for thickness measurement and deposition rate control.
  • Inclusion of substrates up to 4” in diameter.
  • Inclusion of an automated vent line.

All systems include the possibility to automate processes using recipes embedded within our PLASMICON control software. An advanced control system is also included allowing full automation of the deposition process, a data acquisition system; real time data monitoring using a user-friendly 10” touch screen that also facilitates seamless interaction with the system control software.

Elevate your surface treatment capabilities with Plasmionique Table Top Systems, where innovation meets versatility.

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