Plasmionique’s Full Size EBeam / Thermal Evaporation Systems, in addition to resistive thermal evaporation sources, have the capability to integrate multi-pocket electron beam evaporation sources. These standard-sized systems are designed for unparalleled flexibility and are rich in features. This format accommodates a wide range of sources, processes, and characteristics, offering maximum adaptability for your applications.
Options are available for hybrid systems, integrating both electron beam and resistive heating sources and/or the addition of a gridless ion source for ion beam-assisted deposition (IBAD).
In addition to the features described for the Compact EBeam / Thermal Evaporation Systems, the following characteristics can be included:
- Custom-designed deposition chambers with a diameter of 12 inches to 16 inches and a height of approximately 24 to 30 inches. Optionally, chambers with larger access doors equipped with double o-rings for differential pumping can be added.
- Turbo-molecular pump station with a rated speed of 450 to 2000 L/s. Residual pressure ranges from low 10⁻⁷ Torr to mid 10⁻⁸ Torr, ensuring a clean chamber without additional components.
- Water-cooled, multi-pocket electron beam evaporation sources, typically with 4 to 6 pockets, and crucibles with a nominal volume of 3 cc to 15 cc.
- Efficient semiconductor power supplies ranging from 3 kW to 10 kW.
- Automated crucible indexer.
- Beam scanner with a predefined beam scanning pattern.
- Automated shutter.
- At least one quartz crystal microbalance for thickness measurement and deposition rate control.
- Substrate holders for one or multiple substrates ranging from 2 inches to 8 inches in diameter.
- Option for axial position control of the substrate.
- Option for a load-lock system.
- Option for a gridless ion beam source.
- Automated vent line.
All systems include the possibility of automating processes using recipes integrated into our PLASMICON control software. An advanced control system is also included, allowing full automation of the deposition process. With our data acquisition system and a user-friendly 24-inch touch screen, real-time data monitoring is made easy.
Elevate your research capabilities with Plasmionique’s Full Size systems, where innovation meets versatility.
