Our EBeam / Thermal Evaporation Systems allow for the evaporation of metals, dielectrics and organic materials using EBeams, evaporation boats and effusion cells for application to thin film deposition and epitaxial growth of materials.
Plasmionique’s Compact EBeam Thermal Evaporation Systems seamlessly blend the efficiency of a Table Top form factor with the adaptability and upgradability of our larger models.
Our Compact EBeam / Thermal Evaporation Systems have the following upgraded features :
- Deposition chamber having 8” and up to 10” in diameter and about 14”to 16” high. Optional addition of chambers with larger access doors.
- Turbo pump station with nominal speed from 80 up to 300 L/s. Residual pressure in 10-7 Torr range ensuring a clean chamber with no additional components.
- Typically computer controlled, programmable switching voltage (0-6 VDC), switching power supply, capable of delivering up to 220 A.
- Metal boat heaters, basket heaters, and their alumina coated versions and low temperature (LT) effusion sources could be selected.
- The low temperature effusion cells are equipped with their own independent power supply and shutters.
- Minimum of one quartz crystal microbalance used for thickness measurement and deposition rate control.
- Inclusion of substrates up to 4” in diameter.
- Inclusion of an automated vent line.
All systems include the possibility to automate processes using recipes embedded within our PLASMICON control software. An advanced control system is also included allowing full automation of the deposition process, a data acquisition system; real time data monitoring using a user-friendly 15” touch screen that also facilitates seamless interaction with the system control software.
Elevate your research capabilities with Plasmionique Compact Systems, where innovation meets versatility.
