Mobile header

Plasma-based ion implanters are an economical and versatile substitute for conventional ion beam implanters for surface engineering, as well as shallow depth doping for nanoelectronics, photonics or radioisotope implantations for medical applications. The plasma-immersed ion implantation process is a conformal surface treatment and allows for implantation on structures having 3D topography.

Plasmionique’s Full Size Plasma / Ion / Neutral Sources systems are designed for unparalleled flexibility and feature-rich functionality. This form factor accommodates an extensive array of sources, processes, and features, empowering your applications with maximum adaptability.

The systems typically measure 60” in height, 55” in width, and 32” in depth and have the following features:

  • Deposition chamber having 12″ – 14″ in diameter and about 10″ -14″ in height. 
  • Turbo pump station with nominal speed of 450 L/s or higher. Base pressure low 10-6 Torr to mid 10-7 Torr ensuring a clean chamber with no additional components.
  • Addition of various continuous or pulsed plasma sources, such as ICP and ECR.
  • Computer controlled, multiple programmable 450 W solid state RF generators with their internal automatic matching circuits. 
  • Water-cooled substrate holders for use in 2D applications.
  • Optional addition of heated substrate holders. 
  • Inclusion of typically Pulsed-DC biasing with a range of 5 kV to 20 kV.
  • Incorporation of typically four (4) process gas lines and inclusion of an automated vent line. For more gas lines, a gas pod could be provided.

All systems include the possibility to automate processes using recipes embedded within our PLASMICON control software. Additionally, all systems have an option to integrate optical spectroscopy for process monitoring/control.

An advanced control system is also included allowing full automation of the deposition process, a data acquisition system; real time data monitoring using a user-friendly 24” touch screen that also facilitates seamless interaction with the system control software.

Elevate your surface treatment capabilities with Plasmionique Full Size systems, where innovation meets versatility.