{"id":2767,"date":"2024-06-03T17:39:31","date_gmt":"2024-06-03T17:39:31","guid":{"rendered":"https:\/\/plasmionique.com\/plume-icp-and-ion-sources-fr\/"},"modified":"2024-10-09T17:47:17","modified_gmt":"2024-10-09T17:47:17","slug":"plume-icp-and-ion-sources-fr","status":"publish","type":"page","link":"https:\/\/plasmionique.com\/fr\/plume-icp-and-ion-sources-fr\/","title":{"rendered":"Sources de plasma inductivement coupl\u00e9"},"content":{"rendered":"\t\t<div data-elementor-type=\"wp-page\" data-elementor-id=\"2767\" class=\"elementor elementor-2767 elementor-1757\" data-elementor-post-type=\"page\">\n\t\t\t\t<section class=\"elementor-element elementor-element-6ff07e61 page_banner_section e-flex e-con-boxed e-con e-parent\" data-id=\"6ff07e61\" data-element_type=\"container\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t<div class=\"elementor-element elementor-element-57bfabd7 e-con-full banner_content_column e-flex e-con e-child\" data-id=\"57bfabd7\" data-element_type=\"container\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t<div class=\"elementor-element elementor-element-59dd7896 left_bottom_red_border e-flex e-con-boxed e-con e-child\" data-id=\"59dd7896\" data-element_type=\"container\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t<div class=\"elementor-element elementor-element-5ac9184b e-flex e-con-boxed e-con e-child\" data-id=\"5ac9184b\" data-element_type=\"container\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-227867b6 elementor-widget elementor-widget-heading\" data-id=\"227867b6\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h1 class=\"elementor-heading-title elementor-size-default\">Sources de plasma inductivement coupl\u00e9<\/h1>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-1dcb3b03 elementor-widget elementor-widget-text-editor\" data-id=\"1dcb3b03\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>Les sources de plasma inductivement coupl\u00e9 et les sources d&rsquo;ions sont des unit\u00e9s tr\u00e8s polyvalentes qui peuvent \u00eatre adapt\u00e9es \u00e0 une vari\u00e9t\u00e9 d&rsquo;applications. Ces sources peuvent \u00eatre configur\u00e9es pour fonctionner comme plasma \u00e0 distance ou immerg\u00e9.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-5c18ae5b elementor-absolute elementor-widget elementor-widget-button\" data-id=\"5c18ae5b\" data-element_type=\"widget\" data-settings=\"{&quot;_position&quot;:&quot;absolute&quot;}\" data-widget_type=\"button.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<div class=\"elementor-button-wrapper\">\n\t\t\t\t\t<a class=\"elementor-button elementor-button-link elementor-size-sm\" href=\"#formulaire\">\n\t\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t<span class=\"elementor-button-icon\">\n\t\t\t\t<i aria-hidden=\"true\" class=\"fas fa-angle-right\"><\/i>\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-text\">Demande de soumission<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t\t<\/a>\n\t\t\t\t<\/div>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-42853641 e-con-full e-flex e-con e-child\" data-id=\"42853641\" data-element_type=\"container\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t<div class=\"elementor-element elementor-element-1a59d244 e-flex e-con-boxed e-con e-child\" data-id=\"1a59d244\" data-element_type=\"container\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-441f53b2 elementor-widget elementor-widget-image\" data-id=\"441f53b2\" data-element_type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"793\" height=\"595\" src=\"https:\/\/plasmionique.com\/wp-content\/uploads\/2024\/06\/plume.jpg\" class=\"attachment-full size-full wp-image-2587\" alt=\"\" srcset=\"https:\/\/plasmionique.com\/wp-content\/uploads\/2024\/06\/plume.jpg 793w, https:\/\/plasmionique.com\/wp-content\/uploads\/2024\/06\/plume-300x225.jpg 300w, https:\/\/plasmionique.com\/wp-content\/uploads\/2024\/06\/plume-768x576.jpg 768w\" sizes=\"(max-width: 793px) 100vw, 793px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/section>\n\t\t<div class=\"elementor-element elementor-element-41d104c0 e-flex e-con-boxed e-con e-parent\" data-id=\"41d104c0\" data-element_type=\"container\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t<div class=\"elementor-element elementor-element-370fa6e2 e-con-full e-flex e-con e-child\" data-id=\"370fa6e2\" data-element_type=\"container\">\n\t\t\t\t<div class=\"elementor-element elementor-element-55136c11 elementor-widget elementor-widget-text-editor\" data-id=\"55136c11\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>Les sources de plasma immerg\u00e9es sont g\u00e9n\u00e9ralement utilis\u00e9es pour la gravure s\u00e8che, notamment la gravure r\u00e9active par ions (RIE), ou le d\u00e9p\u00f4t chimique en phase vapeur assist\u00e9 par plasma (PECVD). Elles sont \u00e9galement utilis\u00e9es pour des applications telles que la polym\u00e9risation plasma. Les sources de plasma inductivement coupl\u00e9, fonctionnant avec des g\u00e9n\u00e9rateurs RF, ont leur antenne \u00e0 l&rsquo;ext\u00e9rieur de la chambre \u00e0 plasma, ce qui leur conf\u00e8re l&rsquo;avantage d&rsquo;\u00eatre une source de plasma sans \u00e9lectrode, \u00e9liminant ou r\u00e9duisant au minimum la possibilit\u00e9 d&rsquo;introduire des impuret\u00e9s dans le plasma de traitement.<\/p><p>Les sources de plasma inductivement coupl\u00e9 \u00e0 distance sont g\u00e9n\u00e9ralement utilis\u00e9es pour le d\u00e9p\u00f4t assist\u00e9 par plasma ALD, le d\u00e9p\u00f4t r\u00e9actif am\u00e9lior\u00e9 par plasma, le nettoyage \u00e0 distance par plasma, la fonctionnalisation de surface, etc. Les sources de plasma inductivement coupl\u00e9 \u00e0 distance peuvent \u00e9galement \u00eatre configur\u00e9es comme sources de faisceau d&rsquo;ions ou d&rsquo;atomes neutres.<\/p><p>Pour les applications de sources de faisceau d&rsquo;ions et d&rsquo;atomes neutres, un module d&rsquo;extraction de faisceau est \u00e9galement int\u00e9gr\u00e9 \u00e0 chaque source. Des densit\u00e9s de courant de faisceau ionique allant jusqu&rsquo;\u00e0 6 mA\/cm\u00b2 peuvent \u00eatre atteintes avec les sources de faisceau ionique du plasma inductivement coupl\u00e9.<\/p><p>Les exemples d&rsquo;application des sources de faisceau ionique incluent le nettoyage de surface, la gravure par faisceau ionique, le d\u00e9p\u00f4t assist\u00e9 par faisceau ionique (IBAD) et le d\u00e9p\u00f4t par pulv\u00e9risation assist\u00e9e par faisceau ionique.<\/p><p>Les sources d&rsquo;ions sans grille sont de type source d&rsquo;ions End-Hall avec une option de conception unique, permettant de fonctionner sans filament \u00e0 des \u00e9nergies sup\u00e9rieures \u00e0 450 eV.<\/p><p>La source d&rsquo;ions End-Hall g\u00e9n\u00e8re un faisceau ionique large et polyvalent \u00e0 basse \u00e9nergie et \u00e0 haut courant (l&rsquo;\u00e9nergie typique se situe dans la plage de 30 \u00e0 500 eV et le courant du faisceau est de l&rsquo;ordre de 1 A). Cette source d&rsquo;ions fonctionne \u00e0 des pressions inf\u00e9rieures \u00e0 1 mTorr, ce qui en fait un choix id\u00e9al pour le nettoyage d&rsquo;\u00e9chantillons et l&rsquo;activation de surface. Cette source d&rsquo;ions est fr\u00e9quemment utilis\u00e9e, en tandem avec un \u00e9vaporateur, dans les applications de d\u00e9p\u00f4t assist\u00e9 par ion (IAD). Les sources d&rsquo;ions End-Hall sont \u00e9galement utilis\u00e9es dans le d\u00e9p\u00f4t par pulv\u00e9risation assist\u00e9e par ion (IBS), la pulv\u00e9risation \u00e0 double faisceau ionique (DIBS) et de nombreuses autres applications de traitement de surface.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-48c0a793 e-flex e-con-boxed e-con e-parent\" data-id=\"48c0a793\" data-element_type=\"container\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t<div class=\"elementor-element elementor-element-31893b9a e-con-full e-flex e-con e-child\" data-id=\"31893b9a\" data-element_type=\"container\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t<div class=\"elementor-element elementor-element-dd8fc1a left_bottom_gray_decor e-flex e-con-boxed e-con e-child\" data-id=\"dd8fc1a\" data-element_type=\"container\" id=\"formulaire\" 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value=\"p7FS7fSQKlndKXjP1OiDIwqZg4S4KDB75uHkTLoNheg=\" \/><\/div>\n<\/fieldset>\n<\/div>\n\n<\/form>\n<\/div>\n<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-22778751 e-con-full e-flex e-con e-child\" data-id=\"22778751\" data-element_type=\"container\">\n\t\t\t\t<div class=\"elementor-element elementor-element-19a17923 elementor-widget elementor-widget-heading\" data-id=\"19a17923\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Demande d'informations ou de soumission<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-51b10d6a elementor-widget elementor-widget-text-editor\" data-id=\"51b10d6a\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<div class=\"flex flex-grow flex-col max-w-full\"><div class=\"min-h-[20px] text-message flex flex-col items-start whitespace-pre-wrap break-words [.text-message+&amp;]:mt-5 juice:w-full juice:items-end overflow-x-auto gap-2\" dir=\"auto\" data-message-author-role=\"assistant\" data-message-id=\"31c6df9c-432b-4fab-bdd8-0b3d1f718734\"><div class=\"flex w-full flex-col gap-1 juice:empty:hidden juice:first:pt-[3px]\"><div class=\"markdown prose w-full break-words dark:prose-invert light\"><p>Vous souhaitez en savoir plus sur nos produits ou avez besoin d&rsquo;une solution sur mesure ?<\/p><p>Contactez-nous pour obtenir des informations d\u00e9taill\u00e9es et un devis personnalis\u00e9. Notre \u00e9quipe est pr\u00eate \u00e0 vous aider avec vos besoins sp\u00e9cifiques et \u00e0 vous fournir des conseils d&rsquo;experts sur nos technologies avanc\u00e9es.<\/p><\/div><\/div><\/div><\/div>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t","protected":false},"excerpt":{"rendered":"<p>Sources de plasma inductivement coupl\u00e9 Les sources de plasma inductivement coupl\u00e9 et les sources d&rsquo;ions sont des unit\u00e9s tr\u00e8s polyvalentes qui peuvent \u00eatre adapt\u00e9es \u00e0 une vari\u00e9t\u00e9 d&rsquo;applications. Ces sources peuvent \u00eatre configur\u00e9es pour fonctionner comme plasma \u00e0 distance ou immerg\u00e9. Demande de soumission Les sources de plasma immerg\u00e9es sont g\u00e9n\u00e9ralement utilis\u00e9es pour la gravure&#8230;<\/p>\n","protected":false},"author":5,"featured_media":0,"parent":0,"menu_order":18,"comment_status":"closed","ping_status":"closed","template":"","meta":{"_acf_changed":false,"footnotes":""},"class_list":["post-2767","page","type-page","status-publish","hentry"],"acf":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v24.5 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>Sources de plasma inductivement coupl\u00e9 - Plasmionique<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/plasmionique.com\/fr\/plume-icp-and-ion-sources-fr\/\" \/>\n<meta property=\"og:locale\" content=\"fr_FR\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Sources de plasma inductivement coupl\u00e9 - Plasmionique\" \/>\n<meta property=\"og:description\" content=\"Sources de plasma inductivement coupl\u00e9 Les sources de plasma inductivement coupl\u00e9 et les sources d&rsquo;ions sont des unit\u00e9s tr\u00e8s polyvalentes qui peuvent \u00eatre adapt\u00e9es \u00e0 une vari\u00e9t\u00e9 d&rsquo;applications. Ces sources peuvent \u00eatre configur\u00e9es pour fonctionner comme plasma \u00e0 distance ou immerg\u00e9. 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